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Z-Axis Precision Manipulator. SS

Quick Overview

Z-Axis Precision Manipulator. Stainless Steel
- 420MZA040-300

Availability: Call For Availability

Z-Axis Precision Manipulator. SS is available for purchase in increments of 1


  • Adjustable zero set point
  • Connection flange with through holes. traversable flange with threaded holes
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Fixing brake prevents independent movement
  • Guidance and drive are wear-free and maintenance-free
  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
Bakeout temperature230 *C
Bellows guidance necessaryYes. for movement without vacuum
Inner diameterDN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm
MaterialStainless steel (bellows: 316L. flange and tube: 304L. housing: 304)
Mounting orientationany
Nominal diameterDN 40 CF
Operating temperature-15 to 80 *C
Pitch of the ball screw drive2 mm/rotation
Pressure range1.10-10 hPa to ambient pressure
Repeatable precision5 um
Resolution5 um
Service lifeMin. 10000 cycles at full deflection (bellows easy to replace)
Tightness 1.10-11 Pa m3/s
Travel range300 mm

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