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SPM 220. 0.01 hPa. without safety valve SVV 040

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SPM 220. for process pressure up to 0.01 hPa. without safety valve SVV 040
- PTM51360

Availability: Call For Availability

SPM 220. 0.01 hPa. without safety valve SVV 040 is available for purchase in increments of 1


  • Compact dimensions for flexible integration
  • Differentially pumped version for pressures of up to 10 hPa
  • Easy and flexible system integration through a variety of digital and analog inputs and outputs
  • Excellent detection limits for H2. O2. H2O and CO2
  • Minimized background influence on the measurement result
  • Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC
  • SPM ion source for instantaneous process monitoring of up to 10-2 hPa
  • SPM 220. Sputtering Process Monitor mass range 1-100 amu. 115-230 V. 50/60 Hz. for process gas and residual gas analysis at pressure range 0.01 hPa 1 - 10-7 hPa consisting of:
  • PrismaPlus with quadrupole electronics QME 220. quadrupole analyzer QMA 200 M with open ion source and two iridium filaments. yttrium oxid coated
  • System control unit BRU 220 with power supply TPS 311 and remote connector for external access
  • Turbomolecular pumping station with HiPace 80 and backing pump MVP 020-3 DC
  • Total pressure gauge PKR 251
  • Set of cables. 3 meter
  • Quadera-Software for Windows 7. XP Professional (32bit) for parameterisation of PrismaPlus system and for storage and showing measurement data. includes SPM software add-in for Quadera
Analyzer with SPM ion sourceQMA 220
Backing pumpMVP 020-3
Cable length3 m
Description accessoriesAccessories for optimum adaptation of the mass spectrometer to the measurement task at hand.
Detection limit (in argon): Carbon dioxide 100 ppb
Detection limit (in argon): Hydrogen 3000 ppb
Detection limit (in argon): Nitrogen 100 ppb
Detection limit (in argon): Oxygen 100 ppb
Detection limit (in argon): Water vapor 500 ppb
Flange (in)DN 40 CF-F
Mass range1-100 amu
Process pressure to0.01 hPa
Quadrupole controllerQME 220
Rod system: Diameter6 mm
Rod system: Length100 mm
Rod system: MaterialStainless steel
SPM system controllerBRU 220
Supply115-230 V
TurbopumpHiPace 80 with TC 110 RS
Weight: Analyzer incl. Turbo13 kg

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