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ATP 2300 M. DN 250 ISO-F

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ATP 2300 M. DN 250 ISO-F
- TJ66215A

Availability: Call For Availability

ATP 2300 M. DN 250 ISO-F is available for purchase in increments of 1

Details

  • 5-axis magnetically levitated pure turbopump (no drag stage) with a pumping speed of up to 2050 l/s for He
  • DN 250 ISO-F inlet flange
  • Operation with OBC V4 integrated drive electronics
  • Installation in any orientation
  • Remote. Water cooled. Non-heated
  • CE marked and ROHS compliant
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The ATP 2300 M is designed for vacuum applications that require high pumping speed combined with high gas throughput. up to 3000 sccm N2.
The performance of this pump makes it suitable for both light and harsh applications including Semiconductor Implant and HDPCVD. RandD. Coating. etc.
BearingMagnetically Levitated
Compression ratio for Ar 1.108
Compression ratio for H2 7.103
Compression ratio for He 1.105
Compression ratio for N2 1.108
Cooling methodWater
Cooling water consumption1.0 l/min
Cooling water temperature15-25 *C
Cooling water temperature max.40 *C
Flange (in)DN 250 ISO-F
Flange (out)DN 40 ISO-KF
Fore-vacuum max. for N22.1 hPa
Gas throughput for Ar 15.2 hPa l/s
Gas throughput for H2 50.7 hPa l/s
Gas throughput for He 50.7 hPa l/s
Gas throughput for N237.2 hPa l/s
InterfacesRemote
Kennlinie-TIM-RS-2
Mounting orientationin any orientation
Operating voltage200-240 V AC. 50/60 Hz
Power consumption at ultimate pressure350 W
Power consumption max.1000 W
Protection categoryIP 54
Pumping speed for Ar1900 l/s
Pumping speed for H21700 l/s
Pumping speed for He