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ATH 500 M. DN 160 ISO-K

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ATH 500 M. DN 160 ISO-K
- VY412100

Availability: Call For Availability

ATH 500 M. DN 160 ISO-K is available for purchase in increments of 1


  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 550 l/s for N2
  • DN 160 ISO-K inlet flange
  • Compact integrated drive electronics
  • Installation in any orientation
  • Profibus. Water cooled. Non-heated
  • CE marked and ROHS compliant

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The air cooled version is designed for stand alone installation such as in the research laboratories.
The ATH-M series offers a new hybrid turbomolecular vacuum pump with the advanced technology of magnetic bearings for medium sized applications.
The heated version (ATH 500 MT) is designed for corrosive applications such as etch processes in semiconductor manufacturing.
This compact design with integrated control electronics brings the high reliability of 5-axis. maglev rotor suspension to the 300 - 500 liter/sec application range on flanges as small as DN100.
BearingMagnetically Levitated
Compression ratio for Ar 8.106
Compression ratio for H2 2.102
Compression ratio for He 1.104
Compression ratio for N2 2.107
Cooling method
Cooling method. optionalAir
Cooling method. standardWater
Cooling water consumption1.0 l/min
Cooling water temperature15-25 *C
Corrosive gas version
Flange (in)DN 160 ISO-K
Flange (out)DN 25 ISO-KF
Fore-vacuum max. for N22.6 hPa
Gas throughput for Ar42.3 hPa l/s
Gas throughput for H2 169 hPa l/s
Gas throughput for He 169 hPa l/s
Gas throughput for N267.6 hPa l/s
Integrated power supply