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ATH 1603 M. DN 200 CF-F

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ATH 1603 M. DN 200 CF-F
- YN52215A

Availability: Call For Availability

ATH 1603 M. DN 200 CF-F is available for purchase in increments of 1


  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1360 l/s for N2
  • DN 200 CF-F flange for demanding UHV applications
  • Operation with OBC V4 integrated drive electronics
  • Installation in any orientation
  • Profibus. Water cooled. Non-heated
  • CE marked and ROHS compliant
The ATH 1600 M series consists of hybrid turbomolecular vacuum pumps with the advanced technology of magnetic bearings for medium sized applications.
The compact pre-assembled pumping package with a pump mounted controller provides high pumping speed and throughput with a very quick installation time.
The heated version (ATH 1600 MT) is designed for corrosive applications such as etch processes in semiconductor manufacturing.
BearingMagnetically Levitated
Compression ratio for Ar 1.108
Compression ratio for H2 5.102
Compression ratio for He 4.104
Compression ratio for N2 1.108
Cooling methodWater
Cooling water consumption1.0 l/min
Cooling water temperature15-25 *C
Cooling water temperature max.40 *C
Flange (in)DN 200 CF-F
Flange (out)DN 40 ISO-KF
Fore-vacuum max. for N21.7 hPa
Gas throughput for Ar 20.3 hPa l/s
Gas throughput for H2 67.6 hPa l/s
Gas throughput for He 67.6 hPa l/s
Gas throughput for N267.6 hPa l/s
Integrated power supplyYES
Mounting orientationin any orientation
Operating voltage200-240 V AC. 50/60 Hz
Power consumption at ultimate pressure300 W
Power consumption max.650 W

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